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A method for numerical calculation of point spread function of an irregular aperture objective lens

Xiao Wu; Ngoc Diep Lai; Qinggele Li, Phys. Scr. 93, 085101 (2018)

We have presented an efficient numerical method for calculation of point-spread function (PSF) of a high aperture objective lens based on Cartesian coordinates. We have showed that, as compared to the cylindrical coordinates, the use of the Cartesian coordinates allows to calculate the EM field distribution in focal region with complex incident beam profile, such as, annular, non-uniform or asymmetric, etc. We have also showed the benefits of using Cartesian coordinates for deriving isotropic PSF in focal region, which is very important for three-dimensional imaging and fabrication applications

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