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Fabrication of desired three-dimensional structures by holographic assembly technique

Ngoc Diep Lai, Danh Bich Do, Jian Hung Lin, Chia Chen Hsu, Appl. Phys. A 100, 171-175 (2010)

We demonstrate a novel technique to fabricate desired three-dimensional (3D) periodic structures by holographically assembling multiple one-dimensional (1D) or multiple two-dimensional (2D) structures. Thanks to the high-absorption effect of the used material, we fabricated for each time, by employing a two-beam interference technique, a 1D or a 2D structure with very limited film thickness. By using the same sample and repeating the same fabrication process, i.e., (i) spin coating, (ii) exposure, and (iii) post-exposure bake, we created, layer-by-layer, a 3D structure as desired, without the limitation of the number of layers. This technique allows rapid fabrication of very large and thick 3D photonic crystal template with variable period, flexible design, low cost, and possible introduction of arbitrary defects inside a 3D structure.

Open access paper: DOI: 10.1007/s00339-010-5720-2

Acknowledgments
This work is a joint research between the LPQM (ENS Cachan, France) and the NanoOptics Lab (Department of Physics, National Chung Cheng University, Taiwan), in the framework of LIA (Laboratoire International Associé)  laboratory.
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