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Nano-patterning of gold thin film by thermal annealing combined with laser interference techniques

Minh Thanh Do, Quang Cong Tong, Alexander Lidiak, Mai Hoang Luong, Isabelle Ledoux-Rak, Ngoc Diep Lai, Appl. Phys. A 122, 360 (2016)

We present an efficient method for fabrication of desired periodic metallic structures. By using the magnetron sputtering technique, the gold nano-layer was isotropically deposited onto a photoresist template, which had been previously fabricated by an interference technique. During a subsequent thermal annealing process, the gold coating layer melted and split allowing the photoresist core-template to evaporate and consequently leave a desired metal structure on the substrate surface. The proposed method exhibits advantages such as simplicity and low cost, which allows one to realize large-area plasmonic structures that are very promising for numerous applications, especially plasmonic-based photonic devices.

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