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Submicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing

Mai Trang Do, Thi Thanh Ngan Nguyen, Qinggele Li, Henri Benisty, Isabelle Ledoux-Rak, and Ngoc Diep Lai, Opt. Express 21, 20964-20973 (2013)

We demonstrate a new 3D fabrication method to achieve the same results as those obtained by the two-photon excitation technique, by using a simple one-photon elaboration method in a very low absorption regime. Desirable 2D and 3D submicrometric structures, such as spiral, chiral, and woodpile architectures, with feature size as small as 190 nm have been fabricated, by using just a few milliwatts of a continuous-wave laser at 532 nm and a commercial SU8 photoresist. Different aspects of the direct laser writing based on ultralow one-photon absorption (LOPA) technique are investigated and compared with the TPA technique, showing several advantages, such as simplicity and low cost.

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Acknowledgments
This work has been supported by the Laboratoire d'Excellence NanoSaclay, in the framework of the project ONE-FAB-3D, and by the Triangle de la Physique, in the framework of the project PUTTON. M. T. Do and T. T. N. Nguyen acknowledge the fellowship from the Vietnam International Education Development 322 program and Q. Li acknowledges the fellowship from the China Scholarship Council.
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