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Engineered arrays of nitrogen-vacancy color centers in diamond based on implantation of CN− molecules through nanoapertures

P. Spinicelli, A. Dréau, L. Rondin, F. Silva, J. Achard, S. Xavier, S. Bansropun, T. Debuisschert, S. Pezzagna, J. Meijer, V. Jacques and J.-F. Roch, New J. Phys 13, 025014 (2011)

We report a versatile method to engineer arrays of nitrogen-vacancy (NV) color centers in dia- mond at the nanoscale. The defects were produced in parallel by ion implantation through 80 nm diameter apertures patterned using electron beam lithography in a PMMA layer deposited on a diamond surface. The implantation was performed with CN- molecules which increased the NV defect formation yield. This method could enable the realization of a solid-state coupled-spin array and could be used for positioning an optically active NV center on a photonic microstructure.



Work done at LPQM was partially sponsored by the DIAMAG project of Agence Nationale de la Recherche.
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